发明名称 |
Hydrocarbon dielectric heat transfer fluids for microwave plasma generators |
摘要 |
A process and apparatus for cooling a plasma tube generally includes flowing a hydrocarbon dielectric heat transfer fluid into a space defined by the plasma tube and a concentric tube surrounding the plasma tube. In one embodiment, the hydrocarbon fluid is selected to have a dissipation factor less than 0.002 and a thermal efficiency coefficient greater than or equal to 1.30 kJ/kg*K.
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申请公布号 |
US2006054281(A1) |
申请公布日期 |
2006.03.16 |
申请号 |
US20040937946 |
申请日期 |
2004.09.10 |
申请人 |
PINGREE RICHARD E JR;COLSON MICHAEL B;SILBERT MICHAEL |
发明人 |
PINGREE RICHARD E.JR.;COLSON MICHAEL B.;SILBERT MICHAEL |
分类号 |
C23F1/00 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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