| 摘要 |
PROBLEM TO BE SOLVED: To reduce the cost of a high purity silicon for solar batteries by using silicon carbide or silicon nitride, which is cheap and is easy to handle and carry out the maintenance operation, as a reactor material. SOLUTION: The reactor is constructed of an inner cylinder that requires high purity and an outer cylinder that requires high mechanical strength, wherein the inner cylinder is manufactured by using silicon carbide or silicon nitride which is difficult to make a large-sized integrated article through dividing into a plurality of elements by which it is produced cheaply and as a structure capable of easily carrying out the maintenance, and the outer cylinder is produced as a structure capable of maintaining its mechanical strength by using Inconel, Hastelloy or the like which is used universally. COPYRIGHT: (C)2006,JPO&NCIPI
|
