| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a capacitor having a dielectric layer where leakage current is reduced, and to provide its manufacturing method. <P>SOLUTION: In the capacitor comprising a silicon substrate, a lower electrode, a dielectric layer formed on the lower electrode, and an upper electrode formed on the dielectric layer, the dielectric layer is formed of a substance, containing a composite oxide of a transition metal and a lanthanum-based substance. As a result, the leakage current of a capacitor containing transition metal oxide can be reduced sharply. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
