Measurement, orientation and fixation of single crystal(s) for semiconductor industry by orienting single crystal based on angles of lattice plane normal relative to axis of revolving table, before fixing crystal and fastening on support

摘要

Measurement, orientation and fixation of single crystal(s) includes adjustably positioning single crystal on revolving table to determine crystal lattice orientation and angles of lattice plane normal relative to the axis of revolving table during revolution(s) of table based on X-ray reflections, and orienting single crystal based on determined angles serving as reference direction before fixing the single crystal and fastening on a support. An independent claim is also included for an apparatus for carrying out the above method, comprising a revolving table (2) with a receptacle (8) for crystal holder(s) (3) having an adjusting and fixing device for orienting the crystal lattice of a single crystal (1) relative to the axis (X-X) of revolving table as reference direction and for orientated fixation of single crystal; an arrangement of X-ray source (14) and detector (15) vertically adjustable relative to the revolving table and by which angles of the normal of crystal lattice plane relative to the axis of revolving table are determined during revolution(s) of the table, where the determined angles are used to calculate adjusting values for adjusting and fixing device for orientation of the crystal lattice of single crystal; and an adjusting device for a support serving to receive single crystal that is fixed in an oriented manner. The adjusting device operates to be directed perpendicular to the axis of the revolving table.