发明名称 MOAT SYSTEM FOR AN IMPRINT LITHOGRAPHY TEMPLATE
摘要 The present invention is directed to a body having a first area and a second area separated by a recess. The recess is dimensioned to reduce, if not prevent a liquid moving along a surface of the body from traveling between the first and second areas. One or more alignment marks may be positioned within one of the first and second areas. In this manner, the recess functions as a moat by reducing, if not preventing, a quantity of the liquid from being in superimposition with the alignment marks.
申请公布号 WO2006017793(A2) 申请公布日期 2006.02.16
申请号 WO2005US28008 申请日期 2005.08.05
申请人 MOLECULAR IMPRINTS, INC. 发明人 MCMACKIN, IAN M.;LAD, PANKAJ B.
分类号 B05C11/02 主分类号 B05C11/02
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