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经营范围
发明名称
PROBE HEAD HAVING A MEMBRANE SUSPENDED PROBE
摘要
申请公布号
CA2570886(A1)
申请公布日期
2006.02.16
申请号
CA20052570886
申请日期
2005.07.05
申请人
CASCADE MICROTECH, INC.
发明人
SMITH, KENNETH;VAN SYCLE, VICTORIA;JOLLEY, MICHAEL
分类号
G01R31/02
主分类号
G01R31/02
代理机构
代理人
主权项
地址
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