SUBSTRATE CONVEYING MODULE, APPARATUS AND METHOD OF CONVEYING SUBSTRATE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To convey a substrate in a floating state by suppressing a particle contamination and the cutout of the substrate. SOLUTION: This substrate conveying apparatus includes a plurality of substrate conveying modules 2 arranged on a substrate conveying way. The substrate conveying module 2 has a long supporting member 11 and a porous film 12 fixed to this supporting member 11. The porous film 12 is a flexible sheet which receives the supply of gas to a gas flowing space partitioned between the supports 11, expands in a dome shape, and diffuses the supplied gas to an outside. Pressurized gas fed from a pressurized gas supply source 14 through a filter 16 is supplied to the gas flowing space through a gas supply duct 15. The substrate S is held in the floating state by the gas diffused from the porous film 12. COPYRIGHT: (C)2006,JPO&NCIPI