| 摘要 |
<p>A production method for a magnetic recording medium including forming thin films on a substrate using a sputtering method with a target, wherein the target on which an annular-shaped erosion area is formed during sputtering and a substrate holder on which a plurality of substrates are mounted are installed, opposed in parallel, in a manner such that center axes of the target and the substrate holder align with each other, and the substrates are mounted on the substrate holder in positions such that R3/R1 is 1.1 or smaller and R4 is R2 or greater to form thin films.</p> |
