| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet head having filtering pillars capable of preventing foreign substances from entering a flow path and keeping increasing fluid resistance to a minimum. SOLUTION: The inkjet head comprises a plurality of pressure-generating elements disposed on a substrate to generate pressure to provide ink ejection, an ink-feed passage 26 extending through the substrate, a manifold 14', a plurality of filtering pillars 16 integrally formed with the substrate and a flow passing structure defining a flow path which includes ink chambers 28 disposed on the substrate containing the pressure-generating elements therein, ink channels 30 for opening the ink chambers toward a direction of the manifold and nozzles that are in fluid communication with the ink chambers. The manifold 14' is disposed between the pressure-generating elements and the ink-feed passage and recessed from a surface of the substrate provided with the pressure-generating elements on both sides of the ink-feed passage, by a predetermined depth. The filtering pillars 16 are disposed on a bottom surface of the manifold serving as filters to provide a plurality of filter openings therebetween. The method of manufacturing the inkjet head is also disclosed. COPYRIGHT: (C)2006,JPO&NCIPI
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