METHOD FOR MANUFACTURING NOZZLE HEAD BASED ON MEMS AND THE NOZZLE HEAD

摘要

The present invention relates to a nozzle head assembly and a liquid supply apparatus including the nozzle head assembly. The nozzle head assembly comprises: a nozzle substrate; a nozzle tip protruding downwards from a bottom surface of the nozzle substrate and having a nozzle hole vertically passing therethrough; a movable groove concavely formed around the nozzle tip on the bottom surface of the nozzle substrate toward a top surface; a vacuum action hole arranged to be spaced apart from the nozzle tip and vertically passing through the movable groove; and a glass attached to the bottom surface of the nozzle substrate and having a vacuum portion corresponding to the nozzle tip. Thus, the nozzle head assembly enables a stream of liquid to be sprayed finely and continuously from the beginning of spray and can freely control the supply and stop of the supply of the liquid sprayed from a nozzle.