| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an oscillation type piezoelectric acceleration sensor provided with a self-diagnostic function capable of determining whether or not static or dynamic acceleration detection is stably detected without being affected by an environment-resistance change such as a noise, and whether or not the propriety of a normal operation of the sensor itself is detected as an output corresponding to a pseudo-acceleration, by imparting the pseudo-acceleration. <P>SOLUTION: This acceleration sensor comprises a frame 31, at least one oscillation plate 23a provided inside the frame 31, a support body 33 for holding the oscillation plate 23a, a holding pat 32 for holding the support body 33 to be reciprocated along a straight line direction, a lower electrode 24 formed on the oscillation plate 23a, a piezoelectric thin film 25 formed on the lower electrode 24, and an upper electrode 26 formed on the piezoelectric thin film 25. The oscillation plate 23a is expanded and contracted with propagation to the support body 33 via the holding part 32 moved the straight line direction, and a natural frequency of the oscillation plate 23a is changed to detect an acceleration. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
