STAMPER FOR IMPRINT PROCESSING AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a stamper for imprint processing capable of transferring a normal pattern by press processing. SOLUTION: The stamper for imprint processing is provided with a metal-made stamper body on the surface of which a rugged pattern is formed, and a film formed on the surface of the stamper body and containing 10% or over of inorganic carbon. COPYRIGHT: (C)2006,JPO&NCIPI