IMAGE DRAWING METHOD AND APPARATUS,申请号JP20050160768-传众专利搜索

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发明名称	IMAGE DRAWING METHOD AND APPARATUS
摘要	<P>PROBLEM TO BE SOLVED: To decrease uneven resolution and density caused by errors in relative positions of drawing heads and installation angles thereof and by influences of pattern distortion or the like in an image drawing apparatus and an image drawing method for forming a desired two-dimensional pattern on a drawing surface by using a plurality of drawing heads. <P>SOLUTION: A rectangular two-dimensional pixel array is installed in each of exposure heads 30 in an exposure apparatus (image drawing apparatus) so as to make a predetermined angle with the direction of scanning, facing an exposure surface of a photosensitive material 12. Combinations of slits and photo detectors detect positions of light spots in the exposure surface comprising inter-head relay areas. Pixels in the pixel arrays are selected by the measured positions of light spots so as to realize almost ideal N-overlay exposure by suppressing overexposure and underexposure to minimal in the inter-head relay areas. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号	JP2006030966(A)	申请公布日期	2006.02.02
申请号	JP20050160768	申请日期	2005.05.31
申请人	FUJI PHOTO FILM CO LTD	发明人	SUMI KATSUTO;SUZUKI KAZUMASA;KOWADA KAZUTERU;FUKUI TAKASHI
分类号	G03F7/20;H01L21/027;H05K3/00	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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