AN INSPECTION SYSTEM

摘要

An inspection system (10) for three dimensional inspection of minute objects (11) on a substrate (12) , the system comprising: a calibration module (20) to calibrate an inspection angle (30) for capturing an oblique image of the objects, the calibration of the inspection angle being performed by using one object as a reference; at least one image capturor (23) to capture a first image of the objects, and to capture an oblique image of the objects; and an image processor (24) to determine the position of the objects using the first image, and the height of the objects using the oblique image and the first image; wherein if the height of an object is not within a predetermined criteria it is classified as defective and the position of the defective object is identified.