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发明名称
摘要
申请公布号
JP2006503442(A)
申请公布日期
2006.01.26
申请号
JP20040548388
申请日期
2003.10.14
申请人
发明人
分类号
H01L27/12;H01L21/02;H01L21/336;H01L21/76;H01L21/762;H01L29/786
主分类号
H01L27/12
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