| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a dielectric film capable of relatively easily controlling a crystal condition to obtain a stable property on a constant basis, to provide a method for manufacturing a piezoelectric element having a dielectric-film piezoelectric layer, and to provide a method for manufacturing a liquid injection head provided with the piezoelectric element. <P>SOLUTION: The method for manufacturing the dielectric film comprises the steps of applying an solution with an organic metallic compound dissolved to form a dielectric film precursor film, drying the dielectric precursor film, degreasing the dielectric precursor film, and calcining the dielectric precursor film. In the step of calcining, a temperature rising rate is not more than 15(°C/sec) when the temperature of the dielectric precursor film rises from 400°C to 700°C. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
