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发明名称
Katadioptrisches Mikroskopobjektiv
摘要
申请公布号
DE10239956(B4)
申请公布日期
2006.01.19
申请号
DE20021039956
申请日期
2002.08.26
申请人
CARL ZEISS SMT AG
发明人
HERKOMMER, ALOIS;LUGTENBURG, JAN;ULRICH, WILHELM
分类号
G02B13/14;G02B17/08;G02B21/04;G03F7/20
主分类号
G02B13/14
代理机构
代理人
主权项
地址
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