FILM-FORMING METHOD, MANUFACTURING METHOD OF DISPLAY DEVICE, DISPLAY DEVICE, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a film-forming method or the like by which film-forming can be carried out easily and uniformly in forming a thin film by a plasma film-forming method. SOLUTION: In the film-forming method in which a mask 130 having an arbitrary pattern is arranged on a base board 10, and in which the thin film 40 is formed by adhering fluorocarbon onto the base board 10 by a plasma chemical vapor deposition method, the mask 130 formed by a weak magnetic material is used. COPYRIGHT: (C)2006,JPO&NCIPI