| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electric potential measuring apparatus capable of extracting detection signals by almost completely preventing or suppressing the occurrence of reductions in signals due to parasitic capacitance between a detecting electrode and a supporting substrate even in the case that the vibration frequency of a capacitance changing means is high. <P>SOLUTION: The potential measuring apparatus has both the capacitance changing means for changing electrostatic capacitance between a surface to be measured and the detecting electrode 101 and a detecting mean for detecting the amount of charge electrostatically induced to the detecting electrode 101 by the capacitance changing means. The detecting means includes the detecting electrode 101; an insulating film 102 for holding the detecting electrode 101; and a frame member 104 for holding the insulating film 102. In the insulating film 102, a region in contact with the detecting electrode 101 and a region in contact with the frame member 104 do not overlap each other at least at any part in a direction in parallel with the insulating film 102. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
