| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To easily form an actual feature more similar to a designed feature. <P>SOLUTION: For example, in a method for manufacturing a microlens array having a plurality of microlenses to be used for a liquid crystal projector, a microlens array with fidelity to a designed feature is manufactured by using a gray scale mask 30 for lithography which has a plurality of correction portions 32 to form an enhancing feature (protruding features) on the borders of the plurality of microlenses and by gray scale lithography techniques and etching techniques. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
