| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing device which can form a phosphor layer having very high uniform distribution of film thickness, in a phosphor sheet manufacturing device which forms a film of a (storage) phosphor layer through vacuum evaporation. SOLUTION: The device has a gas inlet means which introduces an inert gas into a vacuum chamber during the formation of a film, substrates are conveyed linearly, and vaporization sources are laid out in a direction orthogonal to that of the conveyance of the substrates. COPYRIGHT: (C)2006,JPO&NCIPI
|
