发明名称 WIRE BONDING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To simplify a process of position detection being a reference of cutting operation control of a cutter, and to realize highly precise and stable cutting depth without being affected by wear and defects in the blade edge of the cutter, and a fitting error and a manufacture error of the cutter. <P>SOLUTION: The cutter 3 is made to perform an advance operation with smaller force than cutting resistant force by energizing force of a spring 23. A contact stop state where the cutter is stopped by bringing it into contact with bonding wire A is discriminated based on a displacement amount detected by a displacement sensor 19. The cutting operation of the cutter is controlled so that prescribed cutting depth can be obtained with a detected contact position as a reference. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005353903(A) 申请公布日期 2005.12.22
申请号 JP20040174249 申请日期 2004.06.11
申请人 ULTRASONIC ENGINEERING CO LTD 发明人 KOBAYASHI MASAJI
分类号 H01L21/60 主分类号 H01L21/60
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