| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck device capable of suppressing wear of a surface of a suction stage projecting from a body to be sucked and sticking of reaction products even when the sucked body varies in size is handled. SOLUTION: The electrostatic chuck device 101 comprises an electrostatic chuck stage 102, a power source 103 for an electrostatic chuck, and a changeover switch 104. Respective paired electrodes are arranged so that electrostatic charging regions do not project from a semiconductor wafer 5, and the changeover switch section 104 can apply voltages in pair units to switch the electrostatic regions in steps. COPYRIGHT: (C)2006,JPO&NCIPI |
