| 摘要 |
PROBLEM TO BE SOLVED: To provide a transparent body which is reinforced in durability to the plasma of site glass or a transparent chamber inner face, for a plasma treatment apparatus. SOLUTION: The plasma treatment apparatus is characterized in that an upper electrode 2 and a lower electrode 3 are arranged in a chamber body composed of an aluminium alloy, that a chuck 4 mounting a processed work W is provided on the lower electrode 3, that site glass 5 is inserted in an aperture formed in the chamber body 1, and that a transparent plasma-proof layer 5a composed of yttrium oxide (Y<SB>2</SB>O<SB>3</SB>) polycrystalline is formed at the inner side of the site glass 5. COPYRIGHT: (C)2006,JPO&NCIPI
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