发明名称 DIAMOND FILMS AND METHODS OF MAKING DIAMOND FILMS
摘要 The present invention provides films and substrates coated with films that comprise a nano-crystalline diamond matrix that is substantially free of graphite inclusions. The present invention also provides a method of chemical vapor deposition to prepare the films. The method of chemical vapor deposition operates at a DC bias voltage that substantially precludes the formation of a plasma ion capable of causing a region of a nano-crystalline diamond matrix within a forming film to allotrope when the plasma ion collides with the film.
申请公布号 WO2005056861(A3) 申请公布日期 2005.12.08
申请号 WO2004US40832 申请日期 2004.12.07
申请人 NANOTECH LLC;JOHN, HARVIE, CHAFFIN, III. 发明人 JOHN, HARVIE, CHAFFIN, III.
分类号 B32B9/00;C23C;C23C16/26;C23C16/505;C23C16/52;D01F9/12 主分类号 B32B9/00
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