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发明名称
WATER IMMERSION LITHOGRAPHY EQUIPMENT
摘要
申请公布号
KR20050113462(A)
申请公布日期
2005.12.02
申请号
KR20040038651
申请日期
2004.05.29
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
HAN, KWANG WUN
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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