| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic attraction driver capable of enhancing assemblability of the entire driver by increasing the degree of freedom of a neutralization cable being connected with a mover. SOLUTION: A neutralization means comprising a neutralization cable 50 and a transistor 60 is provided between a mover 30 and ground potential G. Since the mover 30 is formed of a conductor or a low resistor, the neutralization cable can be connected to an arbitrary position of the mover 30. Consequently, the degree of freedom for wiring the neutralization cable 50 can be increased without restricting motion of the mover 30 and assemblability of the entire driver can be enhanced. COPYRIGHT: (C)2006,JPO&NCIPI
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