MESSUNG DER LAGEN ODER KOPLANARITÄT VON KONTAKTELEMENTEN EINES ELEKTRONISCHEN BAUTEILS MIT FLACHER BELEUCHTUNG UND ZWEI KAMERAS

摘要

A method and an apparatus for measuring respective positions of a set of contact elements of an electronic component, wherein the contact elements are illuminated with a light source producing a light with an incident angle of at the most 20° and wherein a first respectively a second image is recorded of said elements by means of a first respectively a second camera which are set up over a triangulation angle with respect to each other.