LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD,申请号SG20050001887-传众专利搜索

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发明名称	LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
摘要
申请公布号	SG115813(A1)	申请公布日期	2005.10.28
申请号	SG20050001887	申请日期	2005.03.28
申请人	ASML NETHERLANDS B.V.	发明人	VAN DER FELTZ, GUSTAAF WILLEM;GUI CHENG-QUN;HOEFNAGELS, JOHAN CHRISTIAAN GERARD
分类号	G03F7/20;H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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