发明名称 |
LASER PROCESSING APPARATUS |
摘要 |
<p>Disclosed is a laser processing apparatus for minimizing generation of sludge and enhancing the processing efficiency while processing an object. The laser processing apparatus includes a beam irradiator for emitting a laser beam from a laser light source, a beam scanner for operating the laser beam emitted from the beam scanner, to be irradiated on a predetermined interval of a processing position of the object repeatedly on the straight, and a condensing lens for regulating a focus of the laser beam emitted from the beam irradiator. The object is movable at least once along a processing direction during processing the object. According to the present invention, it is able to improve the processing efficiency and to work an object with a uniform morphology by using a mask filtering a laser beam irradiated at a rotation turning point of a beam scanning mirror, capable of continuously irradiating a laser beam by deforming the laser beam into an elliptical pattern.</p> |
申请公布号 |
CA2564124(A1) |
申请公布日期 |
2005.10.27 |
申请号 |
CA20042564124 |
申请日期 |
2004.06.02 |
申请人 |
EO TECHNICS CO., LTD. |
发明人 |
HAN, YOU-HIE;HONG, EUN-JEONG;JUNG, WON-CHUI;LEE, HAK-YONG |
分类号 |
H01L21/78;B23K26/06;B23K26/073;B23K26/08 |
主分类号 |
H01L21/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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