Al/AlN JOINT MATERIAL, BASE PLATE FOR POWER MODULE, POWER MODULE AND PROCESS FOR PRODUCING Al/AlN JOINT MATERIAL

摘要

A base plate for power module comprising a metal sheet and, joined thereto, a ceramic substrate, wherein the ceramic substrate exhibits an amount of release agent remaining in its junction interface with the metal sheet, in terms of B-quantity by fluorescent X-ray analysis, of <5, with the region of crystal grain strain occurrence in the junction interface being <=40% based on the total. Alternatively, the ceramic substrate exhibits an amount of release agent remaining in its junction interface with the metal sheet, in terms of B-quantity by fluorescent X-ray analysis, of <5, with the degree of crystal grain strain in the junction interface being <=0.03%.