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发明名称
CHEMICAL VAPOR DEPOSITION APPARATUS
摘要
申请公布号
KR20050100920(A)
申请公布日期
2005.10.20
申请号
KR20040026144
申请日期
2004.04.16
申请人
DONGBUANAM SEMICONDUCTOR INC.
发明人
KO, HAN SEOK
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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