| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an actuator device and a liquid jetting device capable of improving characteristics of a piezoelectrics layer constituting a piezoelectric element, and also capable of stabilizing characteristics of the piezoelectrics layer. <P>SOLUTION: A process for forming a vibrating plate includes a process to form an insulator film that, comprising a zirconium oxide, constitutes the top layer of the vibrating plate having surface roughness Ra within a range of 1-3 nm by forming a zirconium layer while thermally oxidizing it at a prescribed temperature. A process for forming the piezoelectric element includes a process for forming seed titanium by applying titanium (Ti) on the lower electrode by sputtering; and a process for forming a piezoelectric precursor film by applying a piezoelectric material on the seed titanium layer, and then sintering and crystallizing the piezoelectric precursor film to form the piezoelectrics layer. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
