SOLID RECOVERING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a solid recovering apparatus in which maintenance is easily carried out and which can enhance processing efficiency. SOLUTION: The solid recovering apparatus comprises a storage tank 4 for storing a processing solution after development; liquid cyclones 9, 11, 14 into which the processing solution in the storage tank 4 is introduced and which separate the processing solution into a fine-solid-containing concentrated solution and a clear supernatant liquid; a concentrated solution recovery tank 15 for recovering the concentrated solution discharged from first discharge holes of the liquid cyclones; and a return path 12 for returning the clear supernatant liquid discharged from second discharge holes of the liquid cyclones to the storage tank. COPYRIGHT: (C)2006,JPO&NCIPI