| 发明名称 |
Cooling device and heat treating device using the same |
| 摘要 |
A heat treating device ( 50 ) has a cooling sleeve that covers a treating vessel ( 56 ) and a heater ( 100 ). The cooling sleeve has a cylindrical base member ( 110 ) and a cooling pipe ( 112 ) spirally wound on the outer peripheral surface hereof. The cooling pipe ( 112 ) is brazed to the base member ( 110 ).
|
| 申请公布号 |
US2005225937(A1) |
申请公布日期 |
2005.10.13 |
| 申请号 |
US20040505900 |
申请日期 |
2004.08.27 |
| 申请人 |
SAITO TAKANORI;YAMAGA KENICHI |
发明人 |
SAITO TAKANORI;YAMAGA KENICHI |
| 分类号 |
F27B5/04;F27B5/06;H01L21/00;H01L21/205;H01L21/22;H01L21/302;H01L21/31;(IPC1-7):H05K7/20 |
主分类号 |
F27B5/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
