| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum chuck for grinding/polishing, realizing uniform polishing of a sucked body. <P>SOLUTION: This vacuum chuck for grinding/polishing includes a sucking plate 18 composed of at least a sucking layer 12 formed of porous ceramics and annular partition layers 16a to 16c intercepting the transmission of air for sucking and holding a sucked body, wherein the annular partition layers are formed of glass where non-oxide ceramic powder is mixed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
