| 摘要 |
PROBLEM TO BE SOLVED: To accurately form one image free from unnatural feeling by sticking a plurality of scanned images, especially, in the case of observing a sample larger than the visual field of an objective. SOLUTION: The optical device 1 is equipped with a light source 3, an illumination optical system 4 guiding light emitted from the light source 3 to the objective 6, the objective 6 radiating illuminating light toward a carrier 2 holding the sample, an imaging means 7 picking up an image formed through the objective 6, a moving mechanism for relatively moving the carrier 2 and the objective 6, and an image processing part 8 processing the image obtained by relative movement. The image processing part 8 is equipped with a stage for detecting common character parts from the respective images, and a stage for combining the respective images so that the character parts may agree with each other. COPYRIGHT: (C)2006,JPO&NCIPI |
