发明名称 |
Explosion welded design for cooling components |
摘要 |
A method and apparatus are described for making a coldplate. A first component of, for example copper, is explosion welded to a second component of, for example aluminum. The first metal component has a top surface opposite the second metal component and at least one channel proximate the top surface adapted to carry a cooling fluid. The coldplate can be used as an interior wall for a plasma chamber.
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申请公布号 |
US6953143(B2) |
申请公布日期 |
2005.10.11 |
申请号 |
US20030412367 |
申请日期 |
2003.04.11 |
申请人 |
ADVANCED ENERGY INDUSTRIES, INC. |
发明人 |
MAUCK JUSTIN;DILLON STEVE |
分类号 |
B23K20/08;H01J37/32;(IPC1-7):B23K31/00 |
主分类号 |
B23K20/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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