发明名称 Explosion welded design for cooling components
摘要 A method and apparatus are described for making a coldplate. A first component of, for example copper, is explosion welded to a second component of, for example aluminum. The first metal component has a top surface opposite the second metal component and at least one channel proximate the top surface adapted to carry a cooling fluid. The coldplate can be used as an interior wall for a plasma chamber.
申请公布号 US6953143(B2) 申请公布日期 2005.10.11
申请号 US20030412367 申请日期 2003.04.11
申请人 ADVANCED ENERGY INDUSTRIES, INC. 发明人 MAUCK JUSTIN;DILLON STEVE
分类号 B23K20/08;H01J37/32;(IPC1-7):B23K31/00 主分类号 B23K20/08
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