| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an electron source by which the yield of manufacture of an electron source with a bus electrode can be increased and reliability and operation stability can be improved. <P>SOLUTION: A lower wiring 12a a part of which constitutes a lower electrode and an intense-field drift layer 6 are fomed in order on one surface side of an insulating substrate 11, and an insulating layer 8 with an opening formed for the portion corresponding to the forming planned part of a surface electrode 7 is formed on the intense-field drift layer 6 (fig.(a)). Then, a resist layer 9 having an opening pattern for forming a bus electrode is formed on the above one surface side of the insulating substrate 11 and after that, conductive layers 25a, 25b composed of a material of the bus electrode 25 are formed (fig.(b)), and by carrying out a lift-off method, the bus electrode 25 made of the conductive layers 25a is formed (fig.(c)). Then, a smoothing treatment for removing an unnecessary projection 26 protruded continuously in one body from the bus electrode 25 is carried out (fig.(d)), and the surface electrode 7 and a connection wiring 16 are formed (fig.(e)). <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
