| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a nano silicon light emitting element whereby a technology of controlling the luminance of each emitted color is carried out within the same manufacturing process, with respect to the manufacturing method of the nano silicon light emitting element for emitting any of the three primary colors (red, green, and blue) of light by receiving emission of an ultraviolet ray and application of a DC voltage, and to provide the nano silicon light emitting element manufactured by using this manufacturing method. <P>SOLUTION: The manufacturing method of the nano silicon light emitting element includes the steps of forming an amorphous SiO<SB>x</SB>film 3 on a semiconductor substrate 1 wherein silicon atoms 2 and oxygen atoms are mixed by using the high frequency sputtering method; and controlling a crystal size of a nano silicon 6 by a gas pressure and a high frequency power, in a process wherein the silicon atoms 2 are formed as the nano silicon whose thickness is about 3.5 nm or below through heat treatment 4 in an inert gas, the nano silicon light-emitting element emitting any of the three primary colors of light at a low operating voltage at room temperature. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
