| 摘要 |
PROBLEM TO BE SOLVED: To enable a real time inspection to check foreign matters of a wafer in the middle of transport concerning the inspection method for foreign matters of the wafer, and to prevent a large quantity of failures in the volume production line of a semiconductor production process before it happens, thereby maintaining the same yield level. SOLUTION: In the volume production line of a semiconductor production process, the physical size of a foreign matter inspection unit is reduced and the unit is located in the transport system between the input/output ports or processing units of the semiconductor production line. Also, a unit is provided to repeatedly detect foreign matters on the pattern parts on a wafer 111 by means of a lens array 153 of a refractive index variation type, spatial filter 154, and pattern information removal circuit, which makes it possible to inspect foreign matters on the wafer 111 in the middle of transport. COPYRIGHT: (C)2005,JPO&NCIPI
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