| 摘要 |
The micro-electromechanical system has a substrate (S) and a pair of micro-elements (1,2) having facing surfaces (3a,4a) generated via a structuring method with a minimum separation characteristic. One of the micro-elements is bistable and is switched into a second bistable state in which the separation of the surfaces is less than the minimum separation characteristic. An Independent claim for a manufacturing method for a micro-electromechanical system is also included. |
