| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize improvement in productivity of a manufacturing device or appropriate subdivision of factory resources by enabling elicitation of personnel and temporal wastes in a semiconductor manufacturing process. <P>SOLUTION: When event data are reported from a semiconductor manufacturing device to a host (S102), it is determined the lot of which carry-in port the event data is related to (S103 and S104), and associating processing of the event data with the lot name and the carry-in port is performed based on a relation determined by a preliminarily prepared list (S105 and S106). The event data reported from the manufacturing device are converted to a standardized event name based on the definition of the list (S107, S108 and S109), and stored in a storage medium 2 (S110). <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
