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发明名称
Halbleiterbauelement-Testgerät
摘要
申请公布号
DE19680786(B4)
申请公布日期
2005.09.01
申请号
DE19961080786
申请日期
1996.07.24
申请人
ADVANTEST CORP., TOKIO/TOKYO
发明人
KOBAYASHI, YOSHIHITO;YAMASHITA, TSUYOSHI;NAKAMURA, HIROTO;NEMOTO, SHIN;MASUO, YOSHIYUKI;ITO, AKIHIKO
分类号
G01R31/26;G01R31/28;H01L21/677;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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