APPARATUS AND METHOD FOR PROVIDING CHEMICAL LIQUID IN FABRICATING SEMICONDUCTOR DEVICE

摘要

Disclosed are a system and method for supplying chemical during a semiconductor device fabrication process. The system includes a tank to store the chemical, a dispensing unit to hold the chemical, a refill line connected between the tank and the dispensing unit to supply the chemical from the tank to the chemical liquid dispensing unit, and a dispensing line connected between the chemical dispensing unit and a semiconductor substrate to supply the chemical from the chemical dispensing unit to the semiconductor substrate.