VISIBLE LIGHT-RESPONSIVE TITANIUM DIOXIDE PHOTOCATALYST THIN FILM AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a method for depositing a sulfur-added titanium dioxide film which is a very thin film having around several hundred nanometers thickness and exhibits a photocatalytic property in visible light. SOLUTION: The visible light-responsive titanium dioxide photocatalyst thin film is manufactured by using a target material prepared by firing titanium disulfide (TiS2) and adding sulfur to the target material as an impurity by a laser vapor deposition method. The target material is prepared by firing compression-molded titanium disulfide in the air of 350-450°C. The temperature of a substrate on which the visible light-responsive titanium dioxide photocatalyst thin film is deposited is controlled to be 350-450°C and sulfur is deposited in vacuum. COPYRIGHT: (C)2005,JPO&NCIPI