Apparatus for and a method of determining a characteristic of a layer or layers,申请号GB20050014483-传众专利搜索

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发明名称	Apparatus for and a method of determining a characteristic of a layer or layers
摘要
申请公布号	GB0514483(D0)	申请公布日期	2005.08.17
申请号	GB20050014483	申请日期	2005.07.14
申请人	TAYLOR HOBSON LIMITED	发明人
分类号	G01B11/06;H01L21/66	主分类号	G01B11/06
代理机构		代理人
主权项
地址

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