| 摘要 |
PROBLEM TO BE SOLVED: To provide a supplying method of a coating liquid capable of forming at low temperature a metallic film on a substrate having low heat resistance by a coating method and to provide a forming method of the metallic film. SOLUTION: The coating liquid for forming the metallic film contains metal particles having an average particle size of 50 nm or less and a catalyst component capable of decomposing an organic material and having an average particle size of 50 nm or less. The catalyst component is a photocatalyst or a heat catalyst, and a film is formed on a substrate with the coating liquid for forming the metallic film containing the photocatalyst, heating treatment and irradiation of light having a wave length of 450 nm or less are simultaneously conducted to the film. Alternatively, a film is formed on a substrate with a coating liquid for forming the metallic film containing the heat catalyst and heat treatment is conducted to the film. COPYRIGHT: (C)2005,JPO&NCIPI
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