| 摘要 |
PROBLEM TO BE SOLVED: To provide an analysis method and an analysis apparatus for efficiently performing analysis by eliminating wasted measurement time. SOLUTION: In the analysis method, a sample 7 is irradiated with a charged particle beam 6, an analyzing crystal 9 moves by a wavelength sweep span set for a characteristic x-ray 8, while the characteristic x-ray 8 generated from the sample 7 enters into the analyzing crystal 9, and the characteristic x-ray 8 is spectrally divided, and detected after the division. The wavelength sweep span of the analyzing crystal 9 is changed, in response to a diffraction order of the characteristic radiation 8. COPYRIGHT: (C)2005,JPO&NCIPI
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