| 摘要 |
A plasma processing apparatus M 1 is provided with a processing part 20 for supporting a pair of elongate electrodes 30 . The processing part 20 is provided with a plurality of pull bolts 52 (approach-deforming preventers) mutually spacedly arranged in the longitudinal direction of the electrode 30 . A head part of each pull bolt 52 is hooked on a rigid plate 33 through a bolt holder 53 , and a leg part thereof is screwed in the electrode 30 . Owing to this arrangement, the electrodes 30 can be prevented from being deformed by Coulomb's force.
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